Measurement probe and using method for the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTakaaki Kassai, Keishi Kubo, Masateru Doi, Hiroyuki Mochizuki, Keiichi Yoshizumi
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AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTakaaki Kassai, Keishi Kubo, Masateru Doi, Hiroyuki Mochizuki, Keiichi Yoshizumi
Estimating the term…
A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.
A measuring probe, comprising:
A method for using a measuring probe which supports a movable member movably in axis line direction of the movable member, the movable member having a contact portion which comes into contact with a measuring target face at one end and having a reflecting plane formed at the other end for reflecting a measuring light beam, the method comprising:
Dependencies are inferred from the claim text.