Segmented contactor
AssigneeFormFactor, Inc.
InventorsMohammad Eslamy, David V. Pedersen, Harry D. Cobb
Life of this patent
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Abstract
A method of fabricating a large area, multi-element contactor. A segmented contactor is provided for testing semiconductor devices on a wafer that comprises a plurality of contactor units mounted to a substrate. The contactor units are formed, tested, and assembled to a backing substrate. The contactor units may include leads extending laterally for connection to an external instrument such as a burn-in board. The contactor units include conductive areas such as pads that are placed into contact with conductive terminals on devices under test.
Claims16
A method of assembling a segmented contactor, comprising:
- providing an assembly fixture including a plate defining a holding space;
- placing a contactor unit having a first side and a second side into said holding space with said first side facing said plate;
- and
- pressing a backing substrate onto said contactor unit to mount said contactor unit to said backing substrate.
Dependencies are inferred from the claim text.