Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus

A semiconductor manufacturing apparatus having a plurality of portions, comprising:

• a storage device which stores, for each portion of the semiconductor manufacturing apparatus, information representing a lapsed time of use or a product processing count till occurrence of a failure after installation of the portion of the semiconductor manufacturing apparatus;
• and
• a calculation device which receives the information stored in said storage device and outputs function information representing a failure probability and/or a failure rate of each portion of the semiconductor manufacturing apparatus as a function of the lapsed time of use or the product processing count for each portion.