Job flow Petri Net and controlling mechanism for parallel processing
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChuan-Jen Wu, Chyuarn-Yuh Dai, Tien-Hsiang Sun
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChuan-Jen Wu, Chyuarn-Yuh Dai, Tien-Hsiang Sun
Estimating the term…
The present disclosure provides a job flow system for use in a manufacturing environment, such as a semiconductor fab. The job flow system includes a plurality of sequence-related jobs associated with the manufacturing and a computer-controlled Petri Net structure. The Petri Net structure includes a plurality of agents associated with each of the sequence-related jobs. The Petri Net structure also includes a plurality of application processes to be performed by the agents, one or more description files, and a PN Center for loading the one or more description files and activating a first agent to perform one or more of the application processes in response to the one or more description files and in response to process status information from application processes.
A computerized method for controlling parallel distributed processes in a manufacturing environment, the method comprising the steps of:
A computer-implemented job flow system for use in a manufacturing environment, the system comprising a plurality of sequence-related jobs associated with manufacturing and computer-controlled Petri-Net (PN) structure comprising:
A computer program stored on a recordable medium and for use in monitoring and controlling a plurality of computer-controlled semiconductor data collection/summary processes, the computer program including instructions for:
Dependencies are inferred from the claim text.