Two dimensional spatial light modulator

A method of modulating a beam of light, comprising the steps of:

• causing the beam of light to impinge upon a plurality of diffractors, each including a first planar light reflective surface having an aperture formed therein, and a second planar light reflective surface parallel to the first planar light reflective surface and positioned relative to the aperture to receive light passing therethrough;
• and
• moving the second planar light reflective surface relative to the first planar light reflective surface while maintaining the second planar light reflective surface substantially parallel to the first planar light reflective surface,
• whereby a portion of the incident beam of light impinging upon a particular diffractor is diffracted when the first and second light reflective surfaces of the diffractor are separated by an odd multiple of a quarter wavelength and is reflected when the first and second light reflective surfaces of the diffractor are separated by an even multiple of a quarter wavelength.

A method of manufacturing a modulator for modulating a beam of light, comprising the steps of:

• providing a substrate;
• depositing a first sacrificial layer onto the substrate;
• forming a first plurality of holes extending through the first sacrificial layer and terminating onto the substrate;
• depositing an actuator layer onto the first sacrificial layer, the material of the actuator layer substantially filling the plurality of holes to form a first plurality of posts;
• patterning the actuator layer to form a plurality of actuators and a plurality of flexures coupling the actuators to the first plurality of posts;
• depositing a second sacrificial layer onto the patterned actuator layer;
• forming a second plurality of holes extending through the second sacrificial layer and terminating onto the first plurality of posts;
• depositing a tent layer onto the second sacrificial layer;
• patterning the tent layer to form a tent member having a plurality of apertures therein, each of the plurality of apertures located in the tent member to align with one of the plurality of actuators;
• and
• removing the first and second sacrificial layers to release the plurality of actuators and the plurality of flexures,
• whereby the tent member is supported by the second plurality of posts above the substrate, and the plurality of actuators are flexibly coupled by the plurality flexures to the first plurality of posts between the tent member and the substrate.