Low power schottky emitter
AssigneeFEI Company
InventorsGerald G. Magera, Gregory A. Schwind, James B. McGinn, David S. Jun
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AssigneeFEI Company
InventorsGerald G. Magera, Gregory A. Schwind, James B. McGinn, David S. Jun
Estimating the term…
A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.
A method for providing electrons for an electron beam instrument, the method comprising:
A method of making an electron source, comprising:
A method of providing a thermal field emitter for use in an electron beam system, comprising:
A method of providing an electron source for an electron beam system, comprising:
Dependencies are inferred from the claim text.