Electron source structure covered with resistance film
AssigneeCanon Kabushiki Kaisha
InventorsKazuo Kuroda, Noriaki Ohguri, Toshifumi Yoshioka, Takeo Tsukamoto, Yoshio Suzuki
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Abstract
To provide an antistatic film that requires low power consumption and provides satisfactory electric contact, as a measure for preventing an insulating substrate surface having an electronic device formed thereon from being charged. The electronic device includes: an insulating substrate; a conductor; and a resistance film connected with the conductor, the conductor and the resistance film being formed on the insulating substrate, characterized in that the resistance film has a larger thickness in a connection region with the conductor than a thickness in portions other than the connection region.
Claims4
An electron source comprising:
- an insulating substrate;
- an electron-emitting region disposed on the insulating substrate;
- a conductor disposed on the insulating substrate and electrically connected with the electron-emitting region;
- and
- a resistance film disposed on the insulating substrate, covering the electron-emitting region, the conductor, and at least part of the insulating substrate, and electrically connected with the conductor,
- wherein the resistance film has a thickness lesser at a portion thereof on the electron-emitting region, and greater at a portion thereof connected with the conductor.
Dependencies are inferred from the claim text.