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US 7,064,471 B2Granted
Surface acoustic wave device, method of manufacturing the device, and electronic component using the device and method
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsKazuo Ikeda, Kazunori Nishimura, Yasumichi Murase
Life of this patent
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Abstract
A surface acoustic wave (SAW) device includes a comb-shaped electrode 2, a reflector 3 and a plurality of auxiliary electrodes 6a and 6b for surrounding the comb-shaped electrode 2 and the reflector 3, which are electrically independent of each other and have different widths locally. The SAW device is capable of efficiently and electrically uniformizing electric charge generated by pyroelectric property of a piezoelectric substrate 1.
Claims11
A surface acoustic wave (SAW) device comprising:
- first and second comb-shaped electrodes which are provided axially opposite to each other on a piezoelectric substrate;
- a pair of first reflectors and a pair of second reflectors which are provided, on the piezoelectric substrate, at opposite sides of the first comb-shaped electrode along propagation direction of a surface wave generated from the first comb-shaped electrode and at opposite sides of the second comb-shaped electrode along a propagation direction of a surface wave generated from the second comb-shaped electrode, respectively, and are electrically isolated from the first and second comb-shaped electrodes, respectively;
- and
- a plurality of auxiliary electrodes for surrounding the first and second comb-shaped electrodes, the pair of first reflectors and the pair of second reflectors, which are electrically independent of each other and have different widths locally.
1 more element
A surface acoustic wave (SAW) device comprising:
- a comb-shaped electrode which is provided on a piezoelectric substrate;
- a pair of reflectors which are provided, on the piezoelectric substrate, at opposite sides of the comb-shaped electrode along a propagation direction of a surface wave generated from the comb-shaped electrode;
- a plurality of auxiliary electrodes for surrounding the comb-shaped electrode and the pair of reflectors, which are electrically independent of each other and have different widths locally;
- a beltlike input terminal lead-out electrode and a beltlike output terminal lead-out electrode which are each connected to the comb-shaped electrode;
- an input terminal electrode which is connected to the input terminal lead-out electrode;
- and
- an output terminal electrode which is connected to the output terminal lead-out electrode,
- wherein each reflector is formed by a meander line and is electrically connected to the comb-shaped electrode, and
- wherein the input terminal lead-out electrode and the output terminal lead-out electrode are symmetric and are made substantially equal in area, and the input terminal electrode and the output terminal electrode are symmetric and are made substantially equal in area.
6 more elements
An electronic component comprising:
- a) a surface acoustic wave (SAW) device including:
- first and second comb-shaped electrodes which are provided axially opposite to each other on a piezoelectric substrate,
- a pair of first and a pair of second reflectors which are provided, on the piezoelectric substrate, at opposite sides of the first comb-shaped electrode along a propagation direction of a surface wave generated from the first comb-shaped electrode and at opposite sides of the second comb-shaped electrode along a propagation direction of a surface wave generated from the second comb-shaped electrode, respectively, and are electrically isolated from the first and second comb-shaped electrodes, respectively,
- a plurality of auxiliary electrodes for surrounding the first and second comb-shaped electrodes, the pair of first reflectors and the pair of second reflectors, which are electrically independent of each other and have different widths locally,
- a beltlike input terminal lead-out electrode connected to the first comb-shaped electrode and a beltlike output terminal lead-out electrode connected to the second comb-shaped electrode,
- an input terminal electrode electrically connected to the input terminal lead-out electrode and
- an output terminal electrode electrically connected to the output terminal lead-out electrode;
- and
- b) a base member which has the SAW device mounted thereon and is sealed.
6 more elements
An electronic component comprising:
- a) a surface acoustic wave (SAW) device including:
- a comb-shaped electrode which is provided on a piezoelectric substrate;
- a pair of reflectors which are provided, on the piezoelectric substrate, at opposite sides of the comb-shaped electrode along a propagation direction of a surface wave generated from the comb-shaped electrode;
- a plurality of auxiliary electrodes for surrounding the comb-shaped electrode and the pair of reflectors, which are electrically independent of each other and have different widths locally;
- a beltlike input terminal lead-out electrode and a beltlike output terminal lead-out electrode which are each connected to the comb-shaped electrode;
- an input terminal electrode which is connected to the input terminal lead-out electrode;
- and
- an output terminal electrode which is connected to the output terminal lead-out electrode,
- wherein each reflector is formed by a meander line and is electrically connected to the comb-shaped electrode, and
- the input terminal lead-out electrode and the output terminal lead-out electrode are symmetric and are made substantially equal in area, and the input terminal electrode and the output terminal electrode are symmetric and are made substantially equal in area;
- and
- b) a base member which has the SAW device mounted thereon is sealed.
9 more elements
Dependencies are inferred from the claim text.