Bond pad structure comprising multiple bond pads with metal overlap
AssigneeMicron Technology, Inc.
InventorGuy Perry
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AssigneeMicron Technology, Inc.
InventorGuy Perry
Estimating the term…
A bond pad structure comprising two bond pads, methods of forming the bond pad structure, an integrated circuit die incorporating the bond pad structure, and methods of using the bond pad structure are provided. Each of the bond pads comprise stacked metal layers, at least one lower metal layer and an upper metal layer. When the two pads are connected by a conductive material, they function as a single pad. The lower metal layer of one of the bond pads forms an extension that extends beneath the upper metal layer of the other of the bond pad. The lower metal extension functions to block the etching of a dielectric layer that is put down over the upper metal layers and the underlying substrate, for example, during a passivation etch to form the bond pad opening, to protect the substrate from damage.
A bond pad structure in a semiconductor die, comprising:
A bond pad structure in a semiconductor die, comprising:
A bond pad structure in a semiconductor die, comprising:
A bond pad structure in a semiconductor die, comprising:
A bond pad structure in a semiconductor die, comprising;
A bond pad structure in a semiconductor die, comprising:
A bond pad structure in a semiconductor die, comprising:
A bond pad structure in a semiconductor device, comprising:
A bond pad structure in a semiconductor device, comprising:
An integrated circuit die, comprising:
An integrated circuit die, comprising:
An integrated circuit die, comprising:
An integrated circuit die, comprising:
An integrated circuit die, comprising:
A semiconductor die comprising a bond pad structure disposed on a substrate and comprising multiple bond pads, each bond pad comprising overlying upper and lower metal layers, and each bond pad comprising two or more lower metal layers, and the upper metal layer of one of the bond pads overlapping the lower metal layer of another of the bond pads;
A semiconductor die comprising a bond pad structure disposed on a substrate and comprising two or more bond pads connected to function circuitry of the die, each bond pad comprising an overlying upper and two or more lower metal layers, and the upper metal layer of one of the bond pads extending over the lower metal layer of another of the bond pads, and
A bond pad structure disposed on a substrate and comprising:
An integrated circuit supported by a substrate and comprising:
An integrated circuit supported by a substrate and comprising:
An integrated circuit supported by a substrate and comprising a bond pad structure, the bond pad structure comprising:
A semiconductor die, comprising:
A semiconductor wafer, comprising:
A semiconductor wafer, comprising:
A semiconductor wafer, comprising:
Dependencies are inferred from the claim text.