Thin film transistor and method for manufacturing the same
AssigneeNEC Corporation
InventorHiroshi Okumura
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Abstract
A thin film transistor is provided including a transparent insulating substrate, a lower light shielding film disposed above the transparent insulating substrate, a base interlayer film disposed above the lower light shielding film, a semiconductor film disposed above the base interlayer film, wherein the semiconductor film is formed of polycrystalline silicon. A thin film transistor further comprises roughness formed at an interface between the base interlayer and the semiconductor film, a gate insulating film above the semiconductor film, and a gate electrode above the gate insulating film.
Claims11
A thin film transistor comprising:
- a transparent insulating substrate;
- a lower light shielding film disposed above said transparent insulating substrate;
- a base interlayer film disposed above said lower light shielding film;
- a semiconductor film disposed above said base interlayer film, said semiconductor film formed of polycrystalline silicon;
- roughness formed at an interface between said base interlayer and said semiconductor film, wherein said roughness is equal to or larger than about 5 nm and equal to or smaller than about 40 nm;
- a gate insulating film disposed above said semiconductor film;
- and
- a gate electrode disposed above said gate insulating film.
A thin film transistor comprising:
- a transparent insulating substrate;
- a lower light shielding film disposed above said transparent insulating substrate;
- a base interlayer film disposed above said lower light shielding film;
- a semiconductor film disposed above said base interlayer film;
- roughness formed at an interface between said base interlayer and said semiconductor film;
- a gate insulating film disposed above said semiconductor film;
- and
- a gate electrode disposed above said gate insulating film,
- wherein said roughness is equal to or larger than about 5 nm and equal to or smaller than about 40 nm.
Dependencies are inferred from the claim text.