Highly durable silica glass, process and apparatus for producing same, and member and apparatus provided with same
AssigneesTosoh Corporation, Tosoh Quartz Corporation, Tosoh SMG Corporation
InventorsYoshinori Harada, Shuzo Mizutani, Shinkichi Hashimoto, Masakazu Kudoh, Naoki Miura, Katsufumi Takahashi, Hideki Kiyohara
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Abstract
Highly durable silica glass containing 0.01% to 2% by weight of at least one element selected from magnesium, calcium, strontium, barium, yttrium, hafnium and zirconium. The silica glass is produced by melting a powdery material comprising a finely divided silica powder and a finely divided zirconium-containing substance by oxyhydrogen flame or plasma are to form an accumulated molten material layer, and extending the molten material layer outwardly in radial directions.
Claims12
A silica glass member for use in a plasma reaction apparatus for producing a semiconductor or a liquid crystal display using a halogen-containing compound gas and a plasma thereof, which is composed of a silica glass consisting essentially of silica and 0.01% to 2% by weight, based on the weight of the silica glass, of at least one element selected from the group consisting of magnesium, calcium, strontium, barium, yttrium, hafnium and zirconium.
Dependencies are inferred from the claim text.