Plasma treatment apparatus and method for plasma treatment

A plasma treatment apparatus comprising:

• a gas supply means for introducing a processing gas into a space between a first electrode and a second electrode under an atmospheric pressure or around atmospheric pressure;
• a plasma generation means for generating plasma by applying a high frequency voltage to the first electrode or the second electrode under the condition that the processing gas is introduced;
• and
• a transport means for transporting while floating the object to be treated is transported by floating an object to be treated by blowing the processing gas or a transporting gas to the object to be treated,
• wherein a cleaning treatment of a component is carried out by using the first electrode and the second electrode.

A plasma treatment apparatus comprising:

• a gas supply means for introducing a processing gas into a space between a first electrode and a second electrode under an atmospheric pressure or around atmospheric pressure;
• a plasma generation means for generating plasma by applying a high frequency voltage to the first electrode or the second electrode under the condition that the processing gas is introduced;
• and
• a transport means for transporting while floating an object to be treated is transported by floating the object to be treated by blowing the processing gas or a transporting gas to the object to be treated,
• wherein an etching treatment;
• an ashing treatment;
• or a thin film formation is carried out by transferring a relative position of the first electrode and the second electrode, and the object to be treated, and
• wherein the first electrode is formed surrounding the periphery of the second electrode, and formed in a cylindrical shape having the gas supply port of a nozzle shape at its edge.

A plasma treatment apparatus comprising:

• a gas supply means for introducing a processing gas into a space between a first electrode and a second electrode under an atmospheric pressure or around atmospheric pressure;
• a plasma generation means for generating plasma by applying a high frequency voltage to the first electrode or the second electrode under the condition that the processing gas is introduced;
• and
• a transport means for transporting while floating an object to be treated is transported by floating an object to be treated by blowing the processing gas or a transporting gas to the object to be treated,
• wherein a cleaning treatment of a component is carried out by using the first electrode and the second electrode, and
• wherein the first electrode is formed surrounding the periphery of the second electrode, and formed in a cylindrical shape having the gas supply port of a nozzle shape at its edge.