Hexakis(monohydrocarbylamino)disilanes and method for the preparation thereof
AssigneeL'Air Liquide, Societe Anonyme a Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorsChristian Dussarrat, Jean-Marc Girard
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Abstract
A composition and method of preparation, to provide silane compounds that are free of chlorine. The compounds are hexakis(monohydrocarbylamino)disilanes with general formula (I) ((R)HN)3—Si—Si—(NH(R))3 (I) wherein each R independently represents a C1 to C4 hydrocarbyl. These disilanes may be synthesized by reacting hexachlorodisilane in organic solvent with at least 6-fold moles of the monohydrocarbylamine RNH2 (wherein R is a C1 to C4 hydrocarbyl). Such compounds have excellent film-forming characteristics at low temperatures. These films, particularly in the case of silicon nitride and silicon oxynitride, also have excellent handling characteristics.
Claims3
A method of forming a silicon nitride film on a semiconductor substrate comprising:
- (a) introducing into a reaction chamber:
- 1) at least one said substrate;
- 2) a hexakis(monohydrocarbylamino)disilane with general formula (I)
- ((R)HN)3—Si—Si—(NH(R))3 (I)
- wherein each R independently represents a C1 to C4 hydrocarbyl group;
- and
- 3) a nitrogen containing gas;
- and
- (b) inducing a reaction between said hexakis(monohydrocarbylamino)disilane and said gas.
Dependencies are inferred from the claim text.