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US 7,064,063 B2Granted
Photo-thermal induced diffusion
AssigneeIntel Corporation
InventorsGary A. Brist, Gary B. Long, Daryl A. Sato
Life of this patent
Estimating the term…
Abstract
Formation of a mixed-material composition through diffusion using photo-thermal energy. The diffusion may be used to create electrically conductive traces. The diffusion may take place between material layers on one of a package substrate, semiconductor substrate, substrate for a printed circuit board (PCB), or other multilayered substrate. The photo-thermal energy may be supplied by various devices, for example a YAG laser device, CO2 laser device, or other energy source.
Claims19
A method, comprising:
- applying a laser beam to a layer of material including a bottom surface disposed on a layer of metal, wherein the laser beam penetrates beyond the material and into the metal, to diffuse a portion of the material into the metal to form an electrically conductive trace including an alloy of the first material and the metal, wherein the alloy is formed entirely below the bottom surface of the layer of material;
- and
- removing non-diffused portions of the layer of material by chemical mechanical polishing.
A method comprising:
- forming a metal layer on a core;
- placing a diffusion layer on the metal layer;
- applying photo-thermal energy via laser beam to the diffusion layer to diffuse a portion of the diffusion layer into the metal layer, wherein the laser beam penetrates beyond the diffusion layer and into the metal layer;
- and
- removing non-diffused portions of the diffusion layer by chemical mechanical polishing.
2 more elements
A method comprising:
- applying a laser beam to a layer of first material on a layer of second material, wherein the laser beam penetrates beyond the first material and into the second material, to diffuse a portion of the first material into the second material;
- and
- removing non-diffused portions of the first material by chemical mechanical polishing.
Dependencies are inferred from the claim text.