Method and apparatus for localized material removal by electrochemical polishing
AssigneeASM Nutool, Inc.
InventorBulent M. Basol
Life of this patent
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Abstract
An apparatus for electropolishing a conductive material layer is disclosed. The apparatus comprises a porous conductive member configured to contact the conductive layer and having a first connector for receiving electrical power, an electrode insulatively coupled to the porous conductive member having a second connector configured to receive electrical power, a holder insulatively coupled to the porous conductive member and the electrode configured to establish relative motion between the porous conductive member and the conductive layer, and a power supply coupled to the first connector and the second connector configured to supply the electrical power between the electrode and the porous conductive member for electropolishing the conductive layer.
Claims31
A process for electrochemically removing overburden conductive material formed over cavities having cavity conductive material therein on a surface of a workpiece, comprising the steps:
- contacting the overburden conductive material with a remover including a porous conductive member insulatively coupled to an electrode, the remover being smaller in area than the workpiece;
- applying a voltage between the porous conductive member and the electrode;
- establishing relative motion between the workpiece and the remover;
- and
- electrochemically removing the overburden conductive material on the surface of the workpiece while establishing relative motion.
A process for electrochemically removing overburden conductive material formed over cavities having cavity conductive material therein on a surface of a workpiece comprising the steps:
- contacting the overburden conductive material with a porous conductive member insulatively coupled to an electrode;
- applying a voltage between the porous conductive member and the electrode;
- establishing relative motion between the porous conductive member insulatively coupled to the electrode and the workpiece to electrochemically remove the overburden conductive material on the surface of the workpiece;
- and
- self-limiting the electrochemical removal of the overburden conductive material after exposing the cavity conductive material.
Dependencies are inferred from the claim text.