Contact structure and manufacturing method thereof
AssigneeAu Optronics Corporation
InventorsTung-Yu Chen, Han-Chung Lai
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Abstract
A contact structure and manufacturing method thereof is provided. A substrate having a first conductive layer and a dielectric layer thereon is provided. The dielectric layer has a contact opening that exposes a portion of the first conductive layer. A conductive nano-particle layer is formed on the exposed surface of the first conductive layer. Thereafter, a second conductive layer is formed inside the contact opening to cover the conductive nano-particle layer and form a contact structure. The conductive nano-particle layer at the bottom of the contact prevents the second conductive layer from peeling off and costs much less to produce.
Claims12
A method of manufacturing a contact, comprising the steps of:
- providing a substrate having a first conductive layer and a dielectric layer thereon, wherein the dielectric layer has a contact opening that exposes a portion of the first conductive layer;
- forming a conductive nano-particle layer on the exposed surface of the first conductive layer;
- and
- forming a second conductive layer inside the contact opening to cover the conductive nano-particle layer.
Dependencies are inferred from the claim text.