Semiconductor device having shared contact and fabrication method thereof
AssigneeSamsung Electronics Co., Ltd.
InventorsDo-Hyung Kim, Jung-In Hong
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AssigneeSamsung Electronics Co., Ltd.
InventorsDo-Hyung Kim, Jung-In Hong
Estimating the term…
Semiconductor devices and methods of fabrication. A device includes a semiconductor substrate, a gate electrode insulated from the semiconductor substrate by a gate insulation layer, LDD-type source/drain regions formed at both sides of the gate electrode, an interlayer insulation layer formed over the gate electrode and the substrate, and a shared contact piercing the interlayer insulation layer and contacting the gate electrode and one of the LDD-type source/drain regions including at least a part of a lightly doped drain region. Multiple-layer spacers are formed on both sides of the gate structure and used as a mask in forming the LDD-type regions. At least one layer of the spacer is removed in the contact opening to widen the opening to receive a contact plug.
A method of forming a semiconductor device, comprising:
Dependencies are inferred from the claim text.