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US 7,064,014 B2Granted
Backside metallization on sides of microelectronic dice for effective thermal contact with heat dissipation devices
AssigneeIntel Corporation
InventorsRajen Dias, Biju Chandran
Life of this patent
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Abstract
A microelectronic device and methods of fabricating the same comprising a microelectronic die having an active surface, a back surface, and at least one side. The microelectronic die side comprises a trench sidewall, a lip and a channel sidewall. A metallization layer is disposed on the microelectronic die back surface and the trench sidewall.
Claims14
A method of dicing a microelectronic device wafer, comprising:
- providing a microelectronic device wafer comprising a semiconductor wafer having a back surface, said microelectronic device including at least two integrated circuit areas formed therein separated by at least one scribe street;
- forming at least one trench opposing said at least one scribe street and extending from said semiconductor wafer back surface into said semiconductor wafer, wherein said trench comprises at least two sidewalls and a bottom portion;
- forming a metallization layer on said semiconductor wafer back surface, said at least two trench sidewalls and said trench bottom portion;
- and
- forming a channel within said at least one scribe street and extending through said interconnection layer, said semiconductor wafer, and said metallization layer in said trench bottom portion, wherein said at least one trench sidewall resides in a plane substantially parallel to at least one sidewall of said channel.
2 more elements
A method of fabricating a microelectronic device assembly, comprising:
- providing a microelectronic die having an active surface, a back surface, and at least one side, wherein said at least one microelectronic die side comprises at least one trench sidewall, at least one lip and at least one channel sidewall;
- disposing a metallization layer on said microelectronic die back surface and said at least one trench sidewall;
- and
- attaching a heat dissipation device to said microelectronic die back surface with a thermal interface material.
1 more element
Dependencies are inferred from the claim text.