Semiconductor device fabricating apparatus and semiconductor device fabricating method

A semiconductor device fabricating method comprising the steps of:

• preparing an adhesive sheet having a base sheet and an adhesive layer;
• forming a plurality of conductive pads on the adhesive layer of the adhesive sheet;
• placing semiconductor chips on the adhesive layer of the adhesive sheet and connecting the conductive pads to the semiconductor chips with wires;
• sealing the semiconductor chips, the conductive pads and the wires in a sealing resin molding on the adhesive sheet;
• separating the adhesive sheet from the sealing resin molding;
• and
• cutting the sealing resin molding into packages respectively including the semiconductor chips;
• wherein the step of forming the conductive pads on the adhesive layer includes the steps of:
• forming a plated nickel layer and a plated noble metal layer in layers at least on one of the surfaces of a metal foil, placing the metal foil provided with the plated nickel layer and the plated noble metal layer on the adhesive layer of the adhesive sheet, and etching the metal foil by using the plated nickel layer and the plated noble metal layer as a resist to form the conductive pads, each having a reduced part of the metal foil having a small size, and a jutting part of the plated nickel layer and the plated noble metal layer and jutting out from the reduced part.