Lithographic template having a repaired gap defect method of repair and use

A method of forming a lithographic template comprising the steps of:

• providing a substrate, the substrate having an uppermost surface;
• providing a patterning layer supported by the substrate;
• patterning the patterning layer thereby forming a patterned relief layer having a relief structure and at least one gap defect present in the patterned relief layer;
• providing a directly imageable oxide material on the patterned relief layer and within the gap defect;
• imaging the directly imageable oxide material, thereby forming a layer of imaged oxide within the gap defect;
• and
• removing any excess directly imageable oxide material from the patterned relief layer, wherein at least part of the imaged oxide layer remains in the gap defect after it has been repaired.

A lithographic template comprising:

• a lithographic template having a surface;
• a relief structure formed therein the surface of the lithographic template;
• and
• a repaired gap defect formed therein the relief structure.

A method for making a device comprising the steps of:

• providing a substrate;
• coating the substrate with a radiation sensitive material layer;
• fabricating a lithographic template;
• wherein the lithographic template comprises;
• a lithographic template having a surface;
• a relief structure formed therein the surface of the lithographic template;
• and
• a repaired gap defect formed therein the relief structure;
• positioning the lithographic template in contact with the radiation sensitive material layer, the radiation sensitive material layer being between the template and the substrate;
• applying pressure to the template, the radiation sensitive material thereby flowing into the relief pattern on the template;
• photoilluminating the lithographic template to expose at least a portion of the radiation sensitive material layer on the substrate, thereby further affecting the pattern in the radiation sensitive material layer;
• and
• removing the template from the substrate.