Scrubber with sonic nozzle
AssigneeApplied Materials, Inc.
InventorMichael Sugarman
Life of this patent
Estimating the term…
Abstract
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a substrate supported by the plurality of rollers, and a sonic nozzle positioned at an elevation below the elevation of the scrubber brush and adapted so as to output a sonicated fluid spray that contacts a beveled edge or a major surface of the substrate such that fluid having sufficient sonic energy to harm the scrubber brush will not contact the scrubber brush.
Claims11
A method of cleaning a substrate, comprising:
- supporting a substrate in a vertical orientation using a plurality of rollers;
- contacting the substrate supported by the plurality of rollers with a scrubber brush;
- and
- from a sonic nozzle positioned at an elevation below the elevation of the scrubber brush, outputting a sonicated fluid spray that contacts a beveled edge of the vertically oriented substrate located below the sonic nozzle such that fluid having sufficient sonic energy to harm the scrubber brush does not contact the scrubber brush;
- wherein the sonic nozzle is angled so as to direct the sonicated fluid spray towards the vertically oriented substrate, away from the scrubber brush, and at an angle that does not direct sonicated fluid upwardly.
A method of cleaning a substrate, comprising:
- supporting a substrate in a vertical orientation using a plurality of rollers;
- contacting the substrate supported by the plurality of rollers with a scrubber brush;
- and
- from a sonic nozzle positioned at an elevation below the elevation of the scrubber brush, outputting a sonicated fluid spray that contacts a major surface of the vertically oriented substrate supported by the plurality of rollers at a position below the scrubber brush such that fluid having sufficient sonic energy to harm the scrubber brush does not contact the scrubber brush;
- wherein the sonic nozzle is angled so as to direct the sonicated fluid spray towards the vertically oriented substrate, away from the scrubber brush, and at an angle that does not direct sonicated fluid upwardly.
A method of cleaning a substrate, comprising:
- supporting a substrate in a vertical orientation using a plurality of rollers;
- contacting the substrate supported by the plurality of rollers with a scrubber brush;
- and
- from a sonic nozzle positioned at an elevation below the elevation of the scrubber brush, outputting a sonicated fluid spray that contacts a major surface of or a beveled edge of the vertically oriented substrate supported by the plurality of rollers;
- wherein the sonic nozzle is angled downwardly and away from the scrubber brush so as to direct the sonicated fluid spray towards the vertically oriented substrate, away from the scrubber brush, and at an angle that does not direct sonicated fluid upwardly.
Dependencies are inferred from the claim text.