Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface
AssigneeMicron Technology, Inc.
InventorScott E. Moore
Life of this patent
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Abstract
A method and apparatus for planarizing a microelectronic substrate. In one embodiment, the apparatus can include an elongated, non-continuous polishing pad oriented at an angle relative to the horizontal to allow planarizing liquids and materials removed from the microelectronic substrate to flow off the polishing pad under the force of gravity. Two such polishing pads can be positioned opposite each other in a vertical orientation and can share either a common platen or a common substrate carrier. The polishing pads can be pre-attached to both a supply roll and a take-up roll to form a cartridge which can be easily removed from the apparatus and replaced with another cartridge.
Claims3
A method for installing an elongated planarizing medium on a planarizing machine, comprising:
- providing a polishing pad cartridge comprising an elongated member including first and second attachment portions spaced apart from each other, the polishing pad cartridge further comprising a supply roll coupled to the first attachment portion and a take-up roll coupled to the second attachment portion, the supply roll and the take-up roll being unenclosed by a housing;
- installing the supply roll on a supply spindle of the planarizing machine while the elongated planarizing medium is attached to both the supply roll and the take-up roll;
- and
- installing the take-up roll on a take-up spindle of the planarizing machine while the elongated planarizing medium is attached to both the supply roll and the take-up roll.
Dependencies are inferred from the claim text.