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US 7,063,583 B2Granted
Multi-spectral uniform light source
AssigneeWaferMasters, Inc.
InventorWoo Sik Yoo
Life of this patent
Estimating the term…
Abstract
A multi-spectral uniform light source provides a single light source for a variety of applications. The gas or gases inside the light source may be exchanged for another gas or gases depending on the desired application and need for a particular wavelength of emitted light.
Claims12
A method of modulating a light source, the method comprising:
- providing a hollow tube having a first end with a first endcap and a second end with a second endcap, an inlet valve and a first electrode associated with the first end and an outlet valve and a second electrode associated with the second end;
- opening the inlet and outlet valves to provide for a simultaneous modification of gases between said first electrode and said second electrode;
- flowing a portion of a first gas from between said first and second electrodes out of the light source through the outlet valve, and simultaneously flowing a second gas through the inlet valve into between said first and second electrodes, said first gas being different from said second gas;
- providing power to the first and second electrodes during the flowing of the first and second gases to modulate the light source;
- and
- closing the inlet and outlet valves.
3 more elements
Dependencies are inferred from the claim text.