Piezoelectric actuator, method for manufacturing the same, ink jet head, and ink jet recording apparatus
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorKazuo Nishimura
Life of this patent
Estimating the term…
Abstract
A piezoelectric actuator includes a vibration plate 26, a common electrode 27 formed on the vibration plate 26, a piezoelectric element 29 formed on the common electrode 27, a crystal control layer 28 formed on the piezoelectric element 29, a separate electrode 33 formed on the crystal control layer 28, and an electrode line 34 formed on the piezoelectric element 29. The crystal control layer 28 is formed in the displacement region. The crystalline structure of a piezoelectric element 29a in the displacement region is a perovskite structure, and that of a piezoelectric element 29b in the wiring region is a pyrochlore structure.
Claims10
A piezoelectric actuator, comprising a lower electrode, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer for applying, together with the lower electrode, a voltage across the piezoelectric layer, wherein:
- the piezoelectric layer includes a piezoelectric layer in a displacement region that is located directly above a pressure chamber and a piezoelectric layer in a wiring region that is a region other than the displacement region;
- and
- a dielectric constant of the piezoelectric layer in the wiring region is lower than that of the piezoelectric layer in the displacement region.
A piezoelectric actuator, comprising a lower electrode, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer for applying, together with the lower electrode, a voltage across the piezoelectric layer, wherein:
- the piezoelectric layer includes a piezoelectric layer in a displacement region that is located directly above a pressure chamber and a piezoelectric layer in a wiring region that is a region other than the displacement region;
- and the piezoelectric layer in the displacement region has a perovskite structure while the piezoelectric layer in the wiring region has a pyrochiore structure.
Dependencies are inferred from the claim text.