Facilities connection bucket for pre-facilitation of wafer fabrication equipment
AssigneeApplied Materials, Inc.
InventorRonald Vern Schauer
Life of this patent
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AssigneeApplied Materials, Inc.
InventorRonald Vern Schauer
Estimating the term…
A facilities connection locator is provided for use with a support apparatus for supporting manufacturing equipment. The facilities connection locator comprises a fluid tight bucket having a bottom surface, a plurality of side walls extending upwardly from the bottom surface, and a mounting mechanism adapted to mount the fluid tight bucket to the support apparatus so that the fluid tight bucket has a fixed position relative to the support apparatus in an x y and z axes. The facilities connection locator also comprises a fluid connection port, and may comprise a vacuum connection port surrounded by a fluid tight riser. A vacuum line connection may extend through the vacuum connection port and may have a locating flange located a predetermined distance from the connection's top surface, such that coupling the locating flange to the riser fixes the height of the vacuum line connection relative to the top of the riser.
A facilities connection locator for use with a support apparatus for supporting manufacturing equipment, comprising:
Dependencies are inferred from the claim text.