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US 7,062,840 B2Granted
Method for forming permanent magnet targets for position sensors
AssigneeDelphi Technologies, Inc.
InventorsThaddeus Schroeder, Shih-Chia Chang, Lorenzo Guadalupe Rodriguez
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Abstract
A process for forming magnetic targets for position and speed sensors, and magnetic targets formed according to the process. The targets are formed on a conductor-clad substrate by first applying a layer of photoresist material and then patterning and etching the photoresist to form trenches defining the shape and dimensions of the targets. Magnetic material is formed in the trenches and magnetized to form the targets.
Claims12
A method for forming a target comprising a magnetic target track on an insulator substrate, comprising:
- forming a conductive layer on the insulator substrate;
- disposing a photoresist layer over the conductive layer;
- forming at least one trench in the photoresist layer, wherein the at least one trench defines a geometry of the magnetic target track;
- forming hard magnetic material in the trench;
- and
- magnetizing the hard magnetic material to form the magnetic target track.
3 more elements
Dependencies are inferred from the claim text.