Spectroscopically measured overlay target
AssigneeNanometrics Incorporated
InventorRoger R. Lowe-Webb
Life of this patent
Estimating the term…
Abstract
An overlay target for spectroscopic measurement includes at least two diffraction gratings, one grating overlying the other. The diffraction gratings may include an asymmetry relative to each other in order to improve resolution of the presence as well as the direction of any mis-registration. For example, the asymmetry between the two diffraction gratings may be a phase offset, a difference in pitch, line width, etc. The overlay target may be spectroscopically measuring, for example, using an optical model and a best fit analysis. Moreover, the overlay target may be optimized by modeling the overlay target and adjusting the variable parameters and calculating the sensitivity of the overlay target to changes in variable parameters.
Claims13
An overlay target for measuring the alignment of layers on a substrate, said overlay target comprising:
- a first symmetrical grating on a first layer disposed over said substrate, said first symmetrical grating being a diffraction grating;
- a second symmetrical grating on a second layer disposed over said first symmetrical grating, said second symmetrical grating being a diffraction grating, wherein the second symmetrical grating is nominally positioned over the first symmetrical grating so that there is an asymmetry between said first symmetrical grating and said second symmetrical grating in the direction of the periodicity of the first symmetrical grating and the second symmetrical grating;
- and
- a third symmetrical grating disposed over said substrate, said third symmetrical grating being a diffraction grating comprised of a third plurality of parallel lines;
- and a fourth symmetrical grating disposed over said third symmetrical grating, said fourth symmetrical grating being a diffraction grating comprised of a fourth plurality of parallel lines substantially parallel to said third plurality of parallel lines, said third symmetrical grating and said fourth symmetrical grating are asymmetrical relative to each other, and said third plurality of parallel lines and said fourth plurality of parallel lines are substantially perpendicular to said first plurality of parallel lines and said second plurality of parallel lines.
A method of optimizing an overlay target for measurement, said overlay target comprising a first symmetrical diffraction grating and a second symmetrical diffraction grating disposed over said first symmetrical diffraction grating, said method comprising:
- (a) generating a model of said overlay target using fixed parameters and at least one initial variable parameter, wherein said at least one initial variable parameter is an offset phase between said first symmetrical diffraction grating and said second symmetrical diffraction grating;
- (b) calculating the reflectance of said model with the initial variable parameter;
- (c) adjusting the variable parameter;
- (d) calculating the reflectance of said model with the adjusted variable parameter;
- (e) calculating the sensitivity relative to said variable parameter;
- (f) repeating acts (c) through (e) for a plurality of values of said variable parameter, wherein said offset phase is adjusted for a plurality of values between at least zero and fifty percent of the pitch of at least one of said first symmetrical diffraction grating and said second symmetrical diffraction grating;
- and
- (g) determining at least one optimized value for said variable parameter using the calculated sensitivities.
A method of optimizing an overlay target for measurement, said overlay target comprising a first symmetrical diffraction grating and a second symmetrical diffraction grating disposed over said first symmetrical diffraction grating, said method comprising:
- (a) generating a model of said overlay target using fixed parameters and at least one initial variable parameter;
- (b) calculating the reflectance of said model with the initial variable parameter;
- (c) adjusting the variable parameter;
- (d) calculating the reflectance of said model with the adjusted variable parameter;
- (e) calculating the sensitivity relative to said variable parameter;
- (f) repeating acts (c) through (e) for a plurality of values of said variable parameter;
- and
- (g) determining at least one optimized value for said variable parameter using the calculated sensitivities;
- wherein said model further includes a primary variable parameter, said initial variable parameter is a secondary variable parameter, said method further comprising:
- (h) setting the value of said primary variable parameter at a predetermined value;
- (i) optimizing said secondary variable parameter based on said primary variable parameter being set at said predetermined value;
- (j) setting said secondary variable parameter at an optimized value;
- (k) adjusting said primary variable parameter;
- (l) calculating the reflectance of said model with said optimized value for said secondary variable parameter and said adjusted primary variable parameter;
- (m) calculating the sensitivity relative to said adjusted primary variable parameter;
- (n) repeating acts (k) through (m) for a plurality of values of said primary variable parameter;
- and
- (o) determining an optimized value for said primary variable parameter using the calculated sensitivities.
Dependencies are inferred from the claim text.