Pump

A pump, comprising:

• a movable wall including at least a diaphragm;
• an actuator to displace the movable wall;
• a driving device to control driving of the actuator;
• a pump chamber having a volume that is changeable by the displacement of the movable wall;
• at least one inlet flow path to allow an operating fluid to flow into the pump chamber;
• and
• at least one outlet flow path to allow the operating fluid to flow out of the pump chamber, the outlet flow path being opened to the pump chamber during operation of the pump, a combined inertance value of the at least one inlet flow path being smaller than a combined inertance value of the at least one outlet flow path, and the inlet flow path having a fluid resistor to cause a resistance to the flow of the operating fluid to be smaller when the operating fluid flows into the pump chamber than when the operating fluid flows out of the pump chamber;
• the driving device including a displacement controlling device to control movement of the movable wall based on detection information from pump pressure detecting means for detecting pressure inside the pump, and the displacement controlling device controlling the movement of the movable wall based on a calculation value using a predetermined value and a value detected by the pump pressure detecting device.

A pump, comprising:

• a movable wall including at least a diaphragm;
• an actuator to displace the movable wall;
• a driving device to control driving of the actuator;
• a pump chamber having a volume that is changeable by the displacement of the movable wall;
• at least one inlet flow path to allow an operating fluid to flow into the pump chamber;
• and
• at least one outlet flow path to allow the operating fluid to flow out of the pump chamber, the outlet flow path being opened to the pump chamber during operation of the pump, a combined inertance value of the at least one inlet flow path being smaller than a combined inertance value of the at least one outlet flow path, and the inlet flow path having a fluid resistor to cause a resistance to the flow of the operating fluid to be smaller when the operating fluid flows into the pump chamber than when the operating fluid flows out of the pump chamber;
• the driving device including a displacement controlling device to control movement of the movable wall based on detection information from pump pressure detecting means for detecting pressure inside the pump,
• the displacement controlling device controlling a displacement velocity in the pump chamber volume reducing step of the movable wall by changing a displacement time of the movable wall while holding the reached-displacement-position of the movable wall constant.

A pump, comprising:

• a movable wall including at least a diaphragm;
• an actuator to displace the movable wall;
• a driving device to control driving of the actuator;
• a pump chamber having a volume that is changeable by the displacement of the movable wall;
• at least one inlet flow path to allow an operating fluid to flow into the pump chamber;
• and
• at least one outlet flow path to allow the operating fluid to flow out of the pump chamber, the outlet flow path being opened to the pump chamber during operation of the pump, a combined inertance value of the at least one inlet flow path being smaller than a combined inertance value of the at least one outlet flow path, and the inlet flow path having a fluid resistor to cause a resistance to the flow of the operating fluid to be smaller when the operating fluid flows into the pump chamber than when the operating fluid flows out of the pump chamber;
• the driving device including a displacement controlling device to control movement of the movable wall based on detection information from pump pressure detecting means for detecting pressure inside the pump, and
• the displacement controlling device performing a controlling operation so that the movable wall is displaced in a direction in which the volume of the pump chamber is increased after a reduction in the pressure detected by the pump pressure detecting device to a value less than a predetermined value.