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US 7,059,709 B2Granted
Composition for forming piezoelectric, method for producing piezoelectric film, piezoelectric element and ink jet recording head
AssigneesCanon Kabushika Kaisha, Fuji Chemical Co., Ltd.
InventorsMotokazu Kobayashi, Makoto Kubota, Shinji Eritate, Fumio Uchida, Chiemi Shimizu, Kenji Maeda
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Abstract
A composition for forming a piezoelectric containing a dispersoid obtained from metallic compound, wherein the content of hafnium in the composition is 3,000 ppm or less.
Claims4
A method for producing a piezoelectric film for an ink jet recording head, said ink jet recording head comprising:
- a pressure chamber communicating with an ink discharge port;
- a diaphragm provided in correspondence with said pressure chamber;
- and
- a piezoelectric element provided in correspondence with the diaphragm,
- wherein an ink in said pressure chamber is discharged through said ink discharge port by a change of volume in said pressure chamber caused by the piezoelectric element,
- wherein the piezoelectric element comprises the piezoelectric film, and the piezoelectric film is held between a lower electrode and an upper electrode, and
- wherein said method comprises the steps of:
- coating a substrate with a composition for forming the piezoelectric film, to form a coating film, said composition containing a dispersoid obtained from a metallic compound, and the content of hafnium in said composition being 3,000 ppm or less;
- drying the coating film;
- and
- sintering the dried coating film to obtain the piezoelectric film.
8 more elements
Dependencies are inferred from the claim text.