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US 7,053,017 B2Granted
Reduced striae extreme ultraviolet elements
AssigneeCorning Incorporated
InventorsKenneth E. Hrdina, John E. Maxon, Brent R. Mclean
Life of this patent
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Abstract
Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.
Claims11
An extreme ultraviolet lithographic element comprising:
- a titania-containing silica glass having a titania content in the range of 5–10 wt. %, a polished and shaped surface, and an rms striae level less than 0.05 mega Pascals.
A glass boule suitable for making extreme ultraviolet optical elements, said boule comprising a titania-silica glass having a titania content in the range of 5–10 wt. %, a rms striae level less than 0.05 mega Pascals.
Dependencies are inferred from the claim text.