Routing workpieces based upon detecting a fault
AssigneeAdvanced Micro Devices, Inc.
InventorsSam H. Allen, Jr., Michael R. Conboy, Michael L. Miller, Elfido Coss, Jr.
Life of this patent
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Abstract
A method and apparatus is provided for routing workpieces based upon detecting a fault. The method comprises routing a workpiece to a first processing tool identified by a dispatch system, detecting a fault condition associated with the first processing tool and notifying the dispatch system of the detected fault condition. The method further comprises routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.
Claims22
A method, comprising:
- routing a first workpiece to a first processing tool identified by a dispatch system;
- detecting a fault condition associated with the first processing tool;
- notifying the dispatch system of the detected fault condition;
- and
- routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.
A method, comprising:
- routing a first workpiece to a first processing tool identified by a dispatch system;
- detecting a fault condition associated with the first processing tool;
- notifying the dispatch system of the detected fault condition;
- routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition;
- and
- wherein detecting the fault condition comprises:
- receiving operational data from the first processing tool associated with the manufacture of the first workpiece;
- and
- comparing the received operational data with a previously established fault model data.
An apparatus, comprising:
- an interface;
- and
- a control unit communicatively coupled to the interface, the control unit adapted to:
- define a first route for processing a workpiece, wherein the first route includes a first processing tool;
- receive a fault notification from the interface regarding a fault associated with the first processing tool;
- define a second route for processing a next workpiece based on receiving the fault notification, wherein the second route includes a processing tool that is different from the first processing tool;
- and
- route the next workpiece in accordance with the second route.
An apparatus, comprising:
- means for muting a workpiece to a first processing tool identified by a dispatch system;
- means for detecting a fault condition associated with the first processing tool;
- means for notifying the dispatch system of the detected fault condition;
- and
- means for routing a next workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.
An article comprising one or more machine-readable instructions that when executed enable a processor to:
- route a workpiece to a first processing tool identified by a dispatch system;
- detect a fault condition associated with the first processing tool;
- notify the dispatch system of the detected fault condition;
- and
- route a next workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.
A system, comprising:
- a first processing tool and a second processing tool that are each capable of processing one or more semiconductor devices;
- and
- a dispatch unit adapted to:
- define a first route for processing a first group of semiconductor devices, wherein the first route includes the first processing tool;
- receive a fault notification regarding a fault that is detected with the first processing tool;
- define a second route for processing a second group of semiconductor devices based on receiving the fault notification, wherein the second route includes the second processing tool;
- and
- route the second group of semiconductor devices in accordance with the second route.
Dependencies are inferred from the claim text.