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US 7,049,158 B2Granted
Method of manufacturing an emitter
AssigneeHewlett-Packard Development Company, L.P.
InventorsZhizhang Chen, Paul J. Benning, Sriram Ramamoorthi, Thomas Novet
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Abstract
A method is disclosed for creating an emitter having a flat cathode emission surface: First a protective layer that is conductive is formed on the flat cathode emission surface. Then an electronic lens structure is created over the protective layer. Finally, the protective layer is etched to expose the flat cathode emission surface.
Claims9
A method for creating an emitter having a flat cathode emission surface, comprising the steps of:
- forming a protective layer that is conductive on the flat cathode emission surface;
- then creating an electronic lens structure over the protective layer;
- and
- then etching the protective layer to expose the flat cathode emission surface.
1 more element
A method for creating flat tunneling emitter on an electron supply, comprising the steps of:
- applying a tunneling layer on the electron supply;
- then applying a flat cathode layer on the tunneling layer;
- then applying a protective layer that is conductive on the flat cathode layer;
- then applying an electron lens structure on the protective layer;
- and
- then creating an opening in the electron lens structure and protective layer to the flat cathode layer.
3 more elements
Dependencies are inferred from the claim text.