Device for treating silicon wafers
AssigneeGebruder Decker KG
InventorsFrank Werfel, Jürgen Seeberger
Life of this patent
Estimating the term…
Abstract
A device (1) for treating objects, in particular silicon wafers (2), with a fluid (3), comprising a container (4) that holds the fluid (3); a rotatable carrying arrangement (5) for accommodation of the objects to be treated, which is disposed at least partially in the container (4); and a rotatably drivable shaft, which is run on at least one bearing (13, 14) and joined to the carrying arrangement (5); with the bearing (13, 14) including a first bearing member (22), which is joined to the shaft, and a second bearing member (24), which adjoins the first bearing member (22) and contains superconductive material; with the first bearing member (22) being kept spaced from the second bearing member (24) by magnetic forces.
Claims29
A device for treating objects, in particular silicon wafers, with a fluid, comprising
- (a) a container for accommodation of the fluid, said container having adjacent bearing blocks;
- (b) a rotatable carrying arrangement, which is at least partially disposed in the container, serving for accommodation of the objects to be treated;
- and
- (c) a rotatably drivable shaft, which is run on at least one bearing and joined to the carrying arrangement;
- (d) with the at least one bearing including
- (i) a first bearing member joined to the shaft,
- (ii) a second bearing member in the vicinity of the first bearing member, said second bearing member containing high temperature superconductive material which is maintained at temperatures at which the superconductive material is superconductive,
- (iii) with the first bearing member being kept spaced and stabilized from the second bearing member by magnetic forces,
- (iv) a third bearing member around the second bearing member, the third bearing member consisting of a protective coating and a supporting layer providing a vacuum gap and producing thermal insulation of the second bearing member;
- and
- (v) a fourth bearing member comprising a cooling jacket combined with activated carbon cells for cryo-pumping an insulating vacuum.
A device for treating objects, in particular silicon wafers, with a liquid, comprising:
- a. a container for accommodating the liquid, said container having adjacent bearing blocks;
- b. a rotatable carrying arrangement which is at least partially disposed in the container, serving to accommodate the objects to be treated;
- and
- c. a rotatably drivable shaft, which shaft is run on at least one bearing and joined to the carrying arrangement;
- with the at least one bearing including
- i. a first bearing member joined to the shaft;
- ii. a second bearing member in the vicinity of the first bearing member having the shape of an upwardly open bearing shell and containing high temperature superconductive material which is maintained at temperatures at which the superconductive material is superconductive,
- iii. with the first bearing member being kept spaced and stabilized from the second bearing member by magnetic forces;
- iv. a third bearing member consisting of a protective coating and a supporting layer providing a vacuum gap and producing thermal insulation of the second bearing member;
- and
- v. a fourth bearing member comprising a cooling jacket combined with activated carbon cells for cryo-pumping an insulating vacuum.
Dependencies are inferred from the claim text.