Substrate processing system managing apparatus information of substrate processing apparatus

A substrate processing apparatus capable of making communication with an external computer through a network, comprising:

• an operation information acquisition element acquiring time-series information as to operation of said substrate processing apparatus as operation information;
• an operation information storage element storing acquired said operation information;
• a warning element generating a warning signal when said substrate processing apparatus causes a failure;
• an extraction element extracting, when said warning signal is generated, failure-relevant operation information relevant to the cause of generated said warning signal from said operation information stored in said operation information storage element;
• a storage element storing extracted said failure-relevant operation information;
• and
• an apparatus information converting element rendering said failure-relevant operation information stored in said storage element readable from said external computer through said network.

A method of managing a substrate processing apparatus from an external computer connected to said substrate processing apparatus through a network, said method comprising steps of:

• acquiring time-series information as to operation of said substrate processing apparatus as operation information;
• storing acquired said operation information;
• generating a warning signal when said substrate processing apparatus causes a failure;
• extracting, when said warning signal is generated, failure-relevant operation information relevant to the cause of generated said warning signal from said operation information;
• storing extracted said failure-relevant operation information in said storage element;
• and
• rendering said failure-relevant operation information stored in said storage element readable from an external computer through a network.