Vacuum device having a getter
AssigneeHewlett-Packard Development Company, L.P.
InventorsSriram Ramamoorthi, Zhizhang Chen, John Liebeskind, Ronald L. Enck, Jennifer Shih
Life of this patent
Estimating the term…
Abstract
A vacuum device, including a substrate and a support structure having a support perimeter, where the support structure is disposed over the substrate. In addition, the vacuum device also includes a non-evaporable getter layer having an exposed surface area. The non-evaporable getter layer is disposed over the support structure, and extends beyond the support perimeter, in at least one direction, of the support structure forming a vacuum gap between the substrate and the non-evaporable getter layer increasing the exposed surface area.
Claims40
A vacuum device, comprising:
- a substrate;
- a support structure having a support perimeter defined by support sidewalls of said support structure, said support structure disposed over said substrate;
- and
- a non-evaporable getter layer having an exposed surface area and a getter perimeter defined by getter sidewalls of said non-evaporable getter layer, said non-evaporable getter layer disposed on and in cohesive contact with said support structure within said support perimeter, and extending beyond said support perimeter in at least one direction of said support structure forming a vacuum gap between said substrate and said non-evaporable getter layer, increasing said exposed surface area, wherein said support perimeter is substantially within said getter perimeter.
A vacuum device, comprising:
- a substrate;
- a first support structure having a support perimeter, said first support structure disposed over said substrate;
- a non-evaporable getter (NEG) layer having an exposed surface area, said NEG, layer disposed over said first support structure;
- a second support structure having a second perimeter, said second support structure disposed over said NEG layer;
- and
- a second NEG layer having a second exposed surface area, said second NEG layer disposed over said second support structure, wherein said NEG layer extends beyond said support perimeter forming a vacuum gap between said NEG layer and said substrate, and said second NEG layer extends beyond said second perimeter forming a second vacuum gap between said NEG layer and said second NEG layer.
A vacuum device, comprising:
- a substrate;
- a base non-evaporable getter layer disposed on a portion of said substrate
- a support structure having a support perimeter, said support structure disposed over said base non-evaporable getter layer;
- and
- a non-evaporable getter layer having an exposed surface area, said non-evaporable getter layer disposed over said support structure, and extending beyond said support perimeter in at least one direction of said support structure forming a vacuum gap between said substrate and said non-evaporable getter layer, increasing said exposed surface area.
Dependencies are inferred from the claim text.