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US 7,045,794 B1Granted
Stacked lens structure and method of use thereof for preventing electrical breakdown
AssigneeNovelx, Inc.
InventorsJames Spallas, Lawrence Muray
Life of this patent
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Abstract
A micro-electrical system, such as a lens stack for use in a scanning electron microscope, analysis tool, etc., comprises recesses and/or serrations that increase the surface path breakdown, thereby increasing reliability and enabling high voltage operations.
Claims29
An electron beam column lens stack, comprising:
- two conductive layers;
- and
- an insulator layer between the two conductive layers;
- wherein the conductive layers and the insulator layer form a recess that increases the breakdown path.
1 more element
A method, comprising:
- generating an electron beam;
- focusing the beam with an electron beam column incorporating a lens stack, the lens stack having two conductive layers and an insulator layer between the two conductive layers, wherein the conductive layers and the insulator layer form a recess that increases the breakdown path;
- and
- scanning the beam over a target.
1 more element
A electron beam column lens stack, comprising:
- two conductive layers;
- and
- an insulator layer between the two conductive layers;
- wherein the conductive layers and the insulator layer form at least one aperture within the layers and form serrations, which increase the surface breakdown path and extend outward from the at least one aperture.
1 more element
Dependencies are inferred from the claim text.