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US 7,043,325 B1Granted
Method and apparatus for determining product-specific error and tool drift
AssigneeAdvanced Micro Devices, Inc.
InventorErnest Adams, III
Life of this patent
Estimating the term…
Abstract
The present invention provides a method and apparatus for determining product-specific model errors. The method includes determining a plurality of product model errors associated with a corresponding one of a plurality of products. The method also includes determining at least one input parameter for a process model to be used in processing a workpiece to form one of the plurality of products based upon the product model error associated with the product to be formed on the workpiece.
Claims26
A method, comprising:
- determining a plurality of product model errors associated with a corresponding one of a plurality of products;
- and
- determining at least one input parameter for a process model to be used in processing a workpiece to form one of the plurality of products based upon the product model error associated with the product to be formed on the workpiece.
An apparatus, comprising:
- means for determining a plurality of product model errors associated with a corresponding one of a plurality of products;
- and
- means for determining at least one input parameter for a process model to be used in processing a workpiece to form one of the plurality of products based upon the product model error associated with the product to be formed on the workpiece.
An apparatus, comprising:
- a processing tool for processing workpieces to form one of a plurality of products;
- and
- a control unit configured to:
- determine a plurality of product model errors associated with a corresponding one of a plurality of products;
- and
- determine at least one input parameter for a process model to be used in processing a workpiece in the processing tool to form one of the plurality of products based upon the product model error associated with the product to be formed on the workpiece.
3 more elements
Dependencies are inferred from the claim text.