High precision laser machining apparatus

A laser machining apparatus based upon high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprising:

• a base plate having planar upper surfaces;
• parallel spaced apart linear translation stages each having parallel linear bearings with bearing surfaces mounted in the same plane, each linear translation stage having a brushless linear motor;
• a carriage supported between the parallel translation stages by the linear bearings;
• and
• a rotation stage carried by the carriage between the parallel translation stages, said rotation stage comprising a brushless rotary motor having a shaft journaled with a rotation axis parallel to the linear bearings, the carriage and rotation stage having a vertical and a horizontal center of gravity,
• each brushless linear motor being connected to the carriage to apply translation forces in a horizontal plane intersecting said vertical center of gravity,
• a laser optics centering stage mounted to the base plate for moving perpendicular to a given line intersecting an extension of the rotation axis of the rotary motor,
• a laser optics focusing mounted to the centering stage for moving toward and away from an extension the rotating axis of the rotary motor parallel to the given line intersecting the rotating axis of the motor, and
• laser optics mounted on said focusing stage.