Acenaphthylene derivative, polymer, and antireflection film-forming composition

Hydroxymethylacenaphthylene of the following formula (2)

A polymer containing a structural unit of the following formula (3),

• wherein R1 is a hydrogen atom and R2 and R3 individually represent a monovalent atom or a monovalent organic group, the polymer having a polystyrene-reduced weight average molecular weight determined by gel permeation chromatography (GPC) in the range of 500 to 10,000.

An antireflection film-forming composition comprising,

• a polymer having a structural unit of the following formula (4)
• wherein R4 is a monovalent organic group selected from the group consisting of a phenyl group, an alkyl group, an alkenyl group, an acyl group, and a group in which one or more hydrogen atoms of a phenyl group, an alkyl group, an alkenyl group, or an acyl group are replaced by one or more of the same or different substituents selected from the group consisting of a halogen atom, a hydroxyl group, a mercapto group, a nitro group and a sulfonic acid group, R5 is a monovalent atom or a monovalent organic group, and n is 1, and
• a solvent.

An antireflection film-forming composition comprising,

• a polymer having a structural unit of the following formula (4)
• wherein R4 is a monovalent organic group selected from the group consisting of a phenyl group, an alkenyl group, an acyl group, and a group in which one or more hydrogen atoms of a phenyl group, an alkyl group, an alkenyl group, or an acyl group are replaced by one or more of the same or different substituents selected from the group consisting of a halogen atom, a hydroxyl group, a mercapto group, a nitro group and a sulfonic acid group, R5 is a monovalent organic group, and
• a solvent.

An antireflection film-forming composition comprising,

• a polymer having a structural unit of the following formula (4)
• wherein R4is a monovalent organic group selected from the group consisting of an alkenyl group and a group in which one or more hydrogen atoms of a phenyl group, an alkyl group, an alkenyl group, or an acyl group are replaced by one or more of the same or different substituents selected from the group consisting of a halogen atom, a hydroxy group, a mercapto group, a nitro group and a sulfonic acid group, R5 is a monovalent atom or a monovalent organic group, and
• a solvent.