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US 7,036,790 B2Granted
Vacuum pressure regulating valve
AssigneeSMC Corporation
InventorMasao Kajitani
Life of this patent
Estimating the term…
Abstract
An annular valve seat is formed in a connecting path connecting a first main port and a second main port, a circular flow path wall having a diameter greater than a seat diameter is formed around the valve seat so as to surround the valve seat, a circular outer peripheral wall having a diameter greater than the seat diameter and smaller than a diameter of the flow path wall is formed at a disc-shaped valve member, and a restricted flow path is formed between the flow path wall and the outer peripheral wall when the valve member is fitted in the flow path wall.
Claims15
A vacuum pressure regulating valve comprising:
- a first main port and a second main port respectively connected to one of a vacuum pump and a vacuum chamber and the other;
- an annular valve seat formed in a connecting path connecting both of said main ports;
- a circular flow path wall coaxially surrounding the valve seat and having a diameter greater than a seat diameter of the valve seat;
- a disc-shaped valve member which has a front face mounted with a first sealing member for opening and closing the valve seat and a circular outer peripheral wall having a diameter smaller than that of the flow path wall and greater than the seat diameter and which is fitted in the flow path wall to thereby form a restricted flow path between the flow path wall and the outer peripheral wall;
- and
- a driving portion for causing the valve member to carry out opening and closing operations wherein a height of the flow path wall and a height of the outer peripheral wall of the valve member approximate each other.
3 more elements
Dependencies are inferred from the claim text.