Radiation window and method of manufacture

A window device configured to transmit radiation, the device comprising:

• a) a support configured to be subject to a substantial vacuum, and having an opening configured to transmit radiation therethrough;
• b) a film, mounted directly on the support across the opening, including a beryllium material, and having a thickness less than approximately 23 micrometers, the film having an evacuated side configured to face the substantial vacuum, and an ambient side configured to face away from the substantial vacuum;
• c) an adhesive, adhering the film to the support, including a polymeric material;
• and
• d) a coating, covering exposed portions of at least one of the evacuated or ambient sides of the film, and covering a portion of the support surrounding the film, the coating including a boron-hydrogen composition;
• and
• e) the film, the adhesive and the coating forming a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum.

A method for making a radiation window device, comprising the steps of:

• a) applying a liquid adhesive to an area of contact between a film and a support, the film being configured to transmit soft x-rays;
• b) disposing the film on the support and across an opening in the support;
• c) applying a temperature greater than approximately 250 degrees Celsius to the adhesive, the film and the support to cure the adhesive;
• and
• d) coating an exposed portion of the film with an organic material on at least i) an evacuated side of the film configured to face a substantial vacuum, or ii) an ambient side of the film configured to face away from the substantial vacuum.

A method for making a radiation window device, comprising the steps of:

• a) applying a liquid polymide adhesive to an area of contact between a beryllium film and a support;
• b) disposing the film on the support and across an opening in the support;
• c) applying a temperature greater than approximately 250 degrees Celsius to the adhesive, the film and the support to cure the adhesive;
• and
• d) coating an exposed portion of the film with a boron-hydrogen composition on at least i) an evacuated side of the film configured to face a substantial vacuum, or ii) an ambient side of the film configured to face away from the substantial vacuum.

A window device configured to transmit radiation, the device comprising:

• a) a support configured to be subject to a substantial vacuum, and having an opening configured to transmit radiation therethrough;
• b) a film, mounted directly on the support across the opening, having a material and a thickness selected to transmit soft x-rays, the film having an evacuated side configured to face the substantial vacuum, and an ambient side configured to face away from the substantial vacuum;
• c) an adhesive, directly adhering the film to the support;
• d) a coating, covering exposed portions of at least one of the evacuated or ambient sides of the film, and covering a portion of the support surrounding the film;
• and
• e) the film, the adhesive and the coating forming a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum;
• and
• f) the material and the thickness of the film being configured to transmit at least 10% of incident radiation of wavelength longer than 18.5 angstroms.