Method of connecting a multiplicity of optical elements to a basic body
AssigneeCarl Zeiss SMT GmbH
InventorsFrank Melzer, Ulrich Bingel
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Abstract
In a method of connecting a multiplicity of optical elements (9) to a basic body (8), in particular for producing a faceted mirror (1), for example for beam mixing and field imaging for an EUV lighting system, the individual optical elements (9) are positioned on the basic body (8, 14) and subsequently connected to one another by an galvanoplastic process. Alternatively, the multiplicity of optical elements are aligned on an auxiliary structure (11) and the optical elements (9) are subsequently made to grow up galvanoplastically on their rear sides, forming a supporting structure (14) as the basic body.
Claims10
A method of joining together a multiplicity of optical elements on a basic body, comprising:
- positioning a plurality of individual optical elements on a basic body;
- connecting the plurality of the individual optical elements to the basic body by a galvanoplastic joining technique;
- wherein the optical elements comprise mirror facets;
- and
- wherein the mirror facets comprise copper.
A method of joining together a multiplicity of optical elements on a basic body, comprising:
- positioning a plurality of individual optical elements on a basic body;
- connecting the plurality of the individual optical elements to the basic body by a galvanoplastic joining technique;
- wherein the optical elements comprise mirror facets;
- and
- polishing the mirror facets to a surface quality ranging from 0.2 to 0.3 nm RMS.
Dependencies are inferred from the claim text.