Conflict resolution among multiple controllers
AssigneeAdvanced Micro Devices, Inc.
InventorsNaomi M. Jenkins, Jin Wang, Richard J. Markle, Elfido Coss, Jr., Brian K. Cusson
Life of this patent
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Abstract
A method and an apparatus are provided for conflict resolution among a plurality of controllers. The method includes receiving a first control instruction from a first process controller to process a workpiece, receiving a second control instruction from a second process controller to process the workpiece and adjusting at least one of the first control instruction and the second control instruction to process the workpiece to achieve a desired process goal.
Claims24
A method, comprising:
- receiving a first control instruction from a first process controller to process one or more workpieces;
- receiving a second control instruction from a second process controller to process one or more workpieces;
- and
- adjusting at least one of the first control instruction and the second control instruction to process at least one workpiece to achieve a desired process goal in response to determining that the two control instructions represent at least partially conflicting adjustments.
An apparatus, comprising:
- an interface adapted to receive:
- a first control instruction from a first process controller;
- and
- a second control instruction from a second process controller;
- and
- a control unit communicatively coupled to the interface, the control unit adapted to adjust at least one of the first control instruction and the second control instruction to process one or more workpieces to achieve a desired process goal in response to determining that the two control instructions represent at least partially conflicting adjustments.
An apparatus, comprising:
- means for receiving a first control instruction from a first process controller to process a workpiece;
- means for receiving a second control instruction from a second process controller to process the workpiece;
- means for receiving a desired process goal;
- and
- means for adjusting at least one of the first control instruction and the second control instruction to process one or more workpieces to achieve the desired process goal in response to determining that the two control instructions represent at least partially conflicting adjustments.
An article comprising one or more machine-readable storage media containing instructions that when executed enable a processor to:
- receive a first control instruction from a first process controller to process one or more workpieces;
- receive a second control instruction from a second process controller to process the one or more workpieces;
- receive a desired process goal;
- and
- adjust at least one of the first control instruction and the second control instruction to process the one or more workpieces to achieve the desired process goal in response to determining that the two control instructions represent at least partially competing adjustments.
A system, comprising:
- a first process controller adapted to provide a first control instruction to process one or more workpieces;
- a second process controller adapted to provide a second control instruction to process one or more workpieces;
- and
- a supervisory controller adapted to adjust at least one of the first control instruction and the second control instruction to process at least workpiece to achieve a desired process goal in response to determining that the two control instructions represent at least partially conflicting adjustments.
Dependencies are inferred from the claim text.