System and method for fabrication backup planning

A backup planning system scheduling backup operations in a manufacturing system, wherein the manufacturing system comprises a plurality of manufacturing facilities, each of which comprises a plurality of tool groups, and each tool group comprises a plurality of tools, the backup planning system comprising:

• means for providing first capacity information, a master production schedule, and a WIP (work-in-process) profile of the tool group;
• means for assigning a virtual tool to each of the tool groups;
• means for combining capacity of the virtual tool into the first capacity information of the tool group to generate second capacity information thereof accordingly;
• means for determining a first manufacturing plan for the tool group according to the master production schedule, the WIP profile and the second capacity information thereof;
• and
• means for determining a second manufacturing plan according to the workload allocation of the virtual tool in the first manufacturing plan.

A backup planning method, scheduling backup operations in a manufacturing system, wherein the manufacturing system comprises a plurality of manufacturing facilities, each of which comprises a plurality of tool groups, and each tool group comprises a plurality of tools, the method comprising:

• providing first capacity information, a master production schedule, and a WIP (work-in-process) profile of the tool group;
• assigning a virtual tool to each of the tool groups;
• combining capacity of the virtual tool into the first capacity information of the tool group to generate second capacity information thereof accordingly;
• determining a first manufacturing plan for the tool group according to the master production schedule, the WIP profile and the second capacity information thereof;
• and
• determining a second manufacturing plan according to the workload allocation of the virtual tool in the first manufacturing plan.

A computer readable storage medium for storing a computer program providing a backup planning method implemented in a manufacturing system, wherein the manufacturing system comprises a plurality of manufacturing facilities, each of which comprises a plurality of tool groups, and each tool group comprises a plurality of tools, the method comprising:

• receiving first capacity information, a master production schedule, and a WIP (work-in-process) profile of the tool group;
• assigning a virtual tool to each of the tool groups;
• combining capacity of the virtual tool into the first capacity information of the tool group to generate a second capacity information thereof accordingly;
• and
• determining a first manufacturing plan for specifying renewed workload allocation for the tools and virtual tool for the tool group according to the master production schedule, the WIP profile, and the second capacity information thereof.