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AssigneeAgilent Technologies, Inc.
InventorsWilliam T. O'Grady, Joel Taylor, Ryo Takeda, Nobuhiko Yoshimura, John D. McNeill, Donald F. Shafer, Janet Gilmore, Patrick Doane
Estimating the term…
An interface between an automation host and a plurality of tools is used to perform a processing step. The interface includes a single communications and process behavioral connection interface to the automation host. The interface also includes a plurality of virtual host interfaces. Each virtual host interface from the plurality of virtual host interfaces provides a communications and process behavioral interface to one of the tools in the plurality of tools. The automation host can control and coordinate operation of all tools in the plurality of tools via the single communications and process behavioral connection interface.
A control router for providing communication between an automation host and a plurality of manufacturing tools, each of the plurality of manufacturing tools being used to perform a processing step, the control router comprising:
A control router in 1 wherein each virtual host interface from the plurality of virtual host interfaces is compliant with the Semiconductor Equipment Manufacturers Institute (SEMI) generic equipment model (GEM) interface requirements.
A control router in 1 wherein the single communications and process behavioral connection interface to the automation host is compliant with the Semiconductor Equipment Manufacturers Institute (SEMI) generic equipment model (GEM) interface requirements.
A method for connecting an automation host to a plurality of manufacturing tools, each of the manufacturing tools being used to perform a processing step, the method comprising the following steps:
A method in 12 wherein in step (a) each separate communications and process behavioral interface is compliant with the Semiconductor Equipment Manufacturers Institute (SEMI) generic equipment model (GEM) interface requirements.
A method in 12 wherein in step (b) the single communications and process behavioral connection interface to the automation host is compliant with the Semiconductor Equipment Manufacturers Institute (SEMI) generic equipment model (GEM) interface requirements.
Dependencies are inferred from the claim text.