Optical waveguide, forming material and making method
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsKinya Kodama, Tsutomu Kashiwagi, Toshio Shiobara
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Abstract
An optical waveguide-forming material is comprised of a photocurable organopolysiloxane composition comprising an alkali-soluble organopolysiloxane and a photoacid generator, wherein the organopolysiloxane is obtained by (co)hydrolytic condensation of a triorganoxysilane having hydrolyzable epoxide and has an average molecular weight of 500–50,000 as determined by GPC using polystyrene standards. The optical waveguide-forming material, when subjected to pattern formation by photolithography, can be resolved with an alkaline aqueous solution, has a high sensitivity and resolution, and offers a cured film having improved light transmittance, heat resistance and humidity resistance.
Claims16
An optical waveguide formed from an optical waveguide-forming material, said optical waveguide-forming material comprising a photocurable organopolysiloxane composition comprising an alkali-soluble organopolysiloxane and a photoacid generator,
- said organopolysiloxane possessing hydroxyl groups resulting from ring-opening of some or all of epoxides, and being obtained by (co)hydrolytic condensation of at least one silane compound having the formula (1):
- R1Si(OR2)3 (1)
- wherein R1 is a monovalent organo group of 2 to 30 carbon atoms having hydrolyzable epoxide, and R2 is hydrogen or a substituted or unsubstituted monovalent hydrocarbon group of 1 to 10 carbon atoms, and having an average molecular weight of 500 to 50,000 as determined by GPC using polystyrene standards,
- wherein said (co)hydrolytic condensation comprises carrying out (co)hydrolysis in the presence of an acid catalyst, thereby forming a (co)hydrolyzate, and then subjecting the (co)hydrolyzate to polycondensation, while alcohol formed and any solvent present is distilled off by heating, thereby yielding a (co)hydrolytic condensate having silanol groups.
Dependencies are inferred from the claim text.