Method for manufacturing optical waveguide using laser direct writing method and optical waveguide manufactured by using the same
AssigneeElectronics and Telecommunications Research Institute
InventorsWoo Jin Lee, Seung Ho Ahn, Keun Byoung Yoon, Myung Yung Jeong
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Abstract
A method of manufacturing an optical waveguide using a laser direct writing method is disclosed. More particularly, a method for improving refractive index profile of the optical waveguide by overlapping two or more beams using Gaussian laser beam is provided. In addition, it can accomplish an improved waveguide characteristics such as an offset structure of an S-bend type optical waveguide and an asymmetrical curve optical waveguide by individually adjusting the overlapped laser beams.
Claims10
A method for manufacturing an optical waveguide using a laser direct writing method, comprising:
- coating clad material on a substrate;
- coating photo-sensitive polymer on said clad material as a core layer;
- and
- forming the optical waveguide using a laser beam having Gaussian distribution,
- wherein the step of forming the optical waveguide includes the step of overlapping at least two laser beams.
An optical waveguide formed by a laser direct writing method, comprising:
- a substrate;
- clad material coated on said substrate;
- and
- photo-sensitive polymer coated on said clad material as a core layer,
- wherein the refractive index profile of said core layer has a structure of overlapping at least two laser beams having Gaussian distribution, spaced a predetermined distance apart each other.
Dependencies are inferred from the claim text.