Variable micro-capacitor with a high ratio and a low operating voltage
AssigneeCommissariat a l'Energie Atomique
InventorPhilippe Robert
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AssigneeCommissariat a l'Energie Atomique
InventorPhilippe Robert
Estimating the term…
A MEMS micro-capacitor having a variable capacity is disclosed. The MEMS micro-capacitor has at least one fixed electrode (3) positioned on one surface of a substrate (1); bending means with respect to the surface of the substrate including at least one moveable electrode (5) located opposite the fixed electrode (3); a layer of solid dielectric material interposed between the fixed electrode and the moveable electrode; and means (5, 6 and 7) for applying a bending force to the bending means. The bending force is intended to move the moveable electrode (5) with respect to the fixed electrode (3) in order to obtain, between these electrodes, a capacity that varies according to the applied bending force. The bending means are designed to clamp the layer of dielectric material between the moveable electrode and the fixed electrode so as to obtain a variable surface of the clamped layer of dielectric material.
A MEMS micro-capacitor of variable capacity of variable air gap type, comprising:
A method for obtaining a variable capacity between a fixed electrode and a deformable electrode positioned opposite the fixed electrode, means forming a solid dielectric layer being placed between the fixed electrode and the deformable electrode, wherein it comprises the following steps:
Dependencies are inferred from the claim text.