Method and apparatus for aligning diffraction grating
AssigneeNippon Sheet Glass Co., Ltd.
InventorsFumitoshi Kobayashi, Katsuhide Shimmo
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Abstract
A method and an apparatus for aligning the longitudinal direction of grooves of a diffraction grating to a predetermined direction. The method and apparatus detect a diffracted light pattern sent from the diffraction grating, and displace the diffraction grating such that the direction of an arranging direction obtained from the diffracted light pattern is aligned in the predetermined direction.
Claims14
A diffraction grating alignment method for aligning the longitudinal direction of grooves of a diffraction grating in a predetermined direction, the method comprising;
- detecting a diffracted light pattern sent from the diffraction grating;
- and
- displacing the diffraction grating such that an arranging direction obtained from the diffracted light pattern is aligned in the predetermined direction.
A diffraction grating alignment apparatus comprising:
- a placing device for placing a diffraction grating;
- a displacing device for displacing the diffraction grating located on the placing device;
- a light source for radiating light on the diffraction grating located on the placing device;
- a detecting device for detecting a diffracted light pattern sent from the diffraction grating based on radiation of light from the light source;
- and
- a control device for controlling the displacing device to displace the diffraction grating such that the direction of an arranging direction obtained from the diffracted light pattern detected by the detecting device is aligned in the predetermined direction.
Dependencies are inferred from the claim text.