Catadioptric system and exposure device having this system

A catadioptric system comprising:

• a first image forming optical system including, at least, a first reflecting mirror and a second reflecting mirror with the first reflecting mirror set further toward a first plane, in which light from the first plane travels around an outside of the first reflecting mirror and is incident to the second reflecting mirror, light reflected at the second reflecting mirror is incident to the first reflecting mirror and, after light is reflected at the first reflecting mirror, light travels around an outside of the second reflecting mirror so as to form a first intermediate image of the first plane;
• a second image forming optical system including, at least, a third reflecting mirror and a fourth reflecting mirror with the third reflecting mirror set further toward the first plane, in which light having traveled via the first image forming optical system travels around an outside of the third reflecting minor and is incident to the fourth reflecting mirror, light reflected at the fourth reflecting mirror is incident to the third reflecting mirror and, after light is reflected at the third reflecting mirror, light travels around an outside of the fourth reflecting mirror so as to form a second intermediate image of the first plane;
• and
• a refractive type of third image forming optical system that forms a final image of the first plane onto a second plane with light having traveled via the second image forming optical system, wherein:
• optical members constituting the first image forming optical system, the second image forming optical system and the third image forming optical system are all disposed along a single linear optical axis;
• and
• at least one negative lens is provided immediately before each of two reflecting mirrors among the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirrors, on a reflecting surface side.

A catadioptric system which forms an image of a first plane onto a second plane, comprising:

• a first image forming optical system;
• a second image forming optical system;
• a third image forming optical system;
• a first intermediate image of the first plane is formed in an optical path between the first image forming optical system and the second image forming optical system;
• a second intermediate image, as an image of the first intermediate image, is formed in an optical path between the second image forming optical system and the third image forming optical system;
• and
• a final image, as an image of the second intermediate image, is formed on the second plane,
• wherein optical members constituting the first image forming optical system, the second image forming optical system and the third image forming optical system are all disposed along a single linear optical axis,
• wherein the optical members include a plurality of mirrors, and
• the catadioptric system further comprises an optical path where light travels around an outside of at least one of the plurality of mirrors.